KAVITHA JAGABATHUNI, JAYARAM UPPALA, SWAPNA PERAVALI. Design and Simulation Analysis of MEMS based MIM-CPS with Optimized Materials for Low Pressure Bio Medical Applications. Journal of Optoelectronics Laser, [S. l.], v. 42, n. 1, p. 117–126, 2023. Disponível em: http://gdzjg.org/index.php/JOL/article/view/1467. Acesso em: 21 sep. 2023.