Design and Simulation Analysis of MEMS based MIM-CPS with Optimized Materials for Low Pressure Bio Medical Applications
Keywords:MEMS, capacitive pressure sensor, VIKOR methodology, low pressure, sensitivity
In this paper, a MEMS-based capacitive pressure sensor is designed and simulated with optimum materials which are investigated using one of the material selection methodologies, i.e., VIKOR for low Pressure Bio Medical applications. The developed sensor’s operational range is 0–8 KPa. To evaluate the performance of the sensor, the change in capacitance, capacitive sensitivity, and diaphragm deflection are evaluated for a total of 9 design models. To improve the sensor’s performance, the properties of materials for diaphragm and dielectric layer plays a key role. Using VIKOR methodology, three metals are selected as best for diaphragm among 10 metals and 3 best dielectric materials from total 9 materials. For total 9 designs a circular diaphragm with same radius is considered. Among all designs, gold diaphragm with Si3N4 dielectric have good mechanical and capacitive sensitivity as 0.07529375µm/KPa and 0.205fF/KPa.